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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 3, 1998, Pages 1321-1326

Synergetic effects in ion beam energy and substrate temperature during hyperthermal particle film deposition

(3) Marton, D a Boyd, K J a,b Rabalais, J W a

a University of Houston (United States)

b UNIVERSITY OF UTAH (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000171861 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.581145 Document Type: Article

Times cited : (16)

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