Ellipsometric approach for determination of the pseudodielectric function of the Si-interface in the Si-SiO2 structure

Surface Science

Volumn 443, Issue 3, 1999, Pages 186-194

  Paneva, A ^a   Szekeres, A ^b  

^a UNIVERSITY OF SOFIA   (Bulgaria)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

APPROXIMATION THEORY; ELECTRIC INSULATING MATERIALS; ELLIPSOMETRY; SEMICONDUCTING SILICON; SILICA; THERMOOXIDATION;

PSEUDODIELECTRIC FUNCTION;

INTERFACES (MATERIALS);

EID: 0033284567     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(99)00962-0     Document Type: Article

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