Surface and interface effects on ellipsometric spectra of crystalline Si

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1205-1211

  Bell, K A ^a   Mantese, L ^a   Rossow, U ^a,b   Aspnes, D E ^a  

^a NORTH CAROLINA STATE UNIVERSITY   (United States)

^b ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 5844253085     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589440     Document Type: Article

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