Lateral pn-junctions as a novel electron detector for microcolumn systems

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2836-2839

  Fritz, G S ^a   Fresser, H S ^a   Prins, F E ^a   Kern, D P ^a  

^a UNIVERSITY OF TÜBINGEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033271252     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591078     Document Type: Article

References (8)

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