Area evaluation of microscopically rough surfaces

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 1, 1999, Pages 33-39

  Lai, L ^a   Irene, E A ^a  

^a University of North Carolina at Chapel Hill   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0003036927     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590513     Document Type: Article

References (9)

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