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Volumn 63, Issue 9, 1997, Pages 1300-1303
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Direct laser drawing of Fresnel zone plate and its characteristics
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NONE
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Author keywords
Computer generated hologram; Diffraction efficiency; Diffractive optical element; Direct drawing; Focus; Fresnel zone plate; Laser beam writer; Patterning; Photo resist; Step blazing; Substrate
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Indexed keywords
COMPUTER GENERATED HOLOGRAPHY;
ELECTROMAGNETIC WAVE DIFFRACTION;
ETCHING;
FOCUSING;
HOLOGRAMS;
LASER APPLICATIONS;
OPTICAL DEVICES;
SUBSTRATES;
DIFFRACTION EFFICIENCY;
DIRECT LASER DRAWING;
FRESNEL ZONE PLATE;
STEP BLAZING;
PHOTORESISTS;
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EID: 0009091863
PISSN: 09120289
EISSN: None
Source Type: Journal
DOI: 10.2493/jjspe.63.1300 Document Type: Article |
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Times cited : (1)
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References (7)
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