Plasma-induced damage

Microelectronic Engineering

Volumn 49, Issue 1, 1999, Pages 65-81

  Viswanathan, C R ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC BREAKDOWN; INTEGRATED CIRCUIT MANUFACTURE; THRESHOLD VOLTAGE; ULSI CIRCUITS;

PLASMA-INDUCED DAMAGE;

MICROELECTRONICS;

EID: 0033225084     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00430-X     Document Type: Article

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