Nature of the Pb1 interface defect in (100)Si/SiO2 as revealed by electron spin resonance 29Si hyperfine structure

Microelectronic Engineering

Volumn 48, Issue 1, 1999, Pages 113-116

  Stesmans, A ^a   Afanas'ev, V V ^a  

^a UNIVERSITY OF LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL ORIENTATION; INTERFACES (MATERIALS); MOLECULAR STRUCTURE; PARAMAGNETIC RESONANCE; SEMICONDUCTING SILICON; SILICA; TENSORS;

MOLECULAR ORBITAL ANALYSIS;

SEMICONDUCTING FILMS;

EID: 0033190235     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(99)00350-0     Document Type: Article

References (15)

1. See, e.g., E. Poindexter and P. Caplan, Prog. Surf. Sci. 14, 211 (1983); R. Helms and E. Poindexter, Rep. Prog. Phys. 57, 791 (1994)
2. See, e.g., E. Poindexter and P. Caplan, Prog. Surf. Sci. 14, 211 (1983); R. Helms and E. Poindexter, Rep. Prog. Phys. 57, 791 (1994)
3. K. Brower, Appl. Phys. Lett. 43, 1111 (1983)
4. E. Poindexter, P. Caplan, B. Deal, and R. Razouk, J. Appl. Phys. 52, 879 (1981)
5. A. Stesmans and V. V. Afanas'ev, J. Phys.: Condens. Matter 10, L19 (1998)
6. A. Stesmans and V. V. Afanas'ev, J. Appl. Phys. 83, 2449 (1998)
7. 2 Interface, edited by C. R. Helms and B. E. Deal (Plenum, New York, 1988), p. 271
8. K. L. Brower, Z. Phys. Chem. Neue Folge 151, 177 (1987)
9. J. L. Cantin, M. Schoisswohl, H. J. von Bardeleben, N. H. Zoubir, and M. Vergnat, Phys. Rev. B52, R11599 (1995)
10. N. Hadj Zoubir, M. Vergnat, T. Delatour, A. Burneau, Ph. de Donato, and O. Barrès, Thin Solid Films 255, 288 (1995)
11. W. E. Carlos, Appl. Phys. Lett. 50, 1450 (1987)
12. G. D. Watkins and J. W. Corbett, Phys. Rev. 121, 1001 (1961); 134A, 1359 (1964)
13. G. D. Watkins and J. W. Corbett, Phys. Rev. 121, 1001 (1961); 134A, 1359 (1964)
14. A. Stesmans, Appl. Surf. Sci. 30, 134 (1987)
15. A. H. Edwards and W. B. Fowler, Microelectr. Reliab. 39, 3 (1999)