Chemistry and kinetics of chemical vapor deposition of pyrolytic carbon from methane

Journal De Physique. IV : JP

Volumn 9 I, Issue 8, 1999, Pages

  Becker, A ^a   Hu, Z ^a   Huettinger, K J ^a  

^a UNIVERSITY OF KARLSRUHE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTORS; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DEPOSITION; GASES; HYDROGEN; LOW TEMPERATURE OPERATIONS; METHANE; REACTION KINETICS; SUBSTRATES; SURFACES; THERMAL EFFECTS;

GAS PHASE REACTIONS; HYDROGEN INHIBITION; PYROLYTIC CARBON; SURFACE DEPOSITION REACTIONS;

CARBON;

EID: 0033187962     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:1999805     Document Type: Article

References (23)

1. W. Benzinger, K. J. Huettinger, a) Carbon 34, (1996) 1465.
2. b) Carbon 36, (1998) 1033.
3. Carbon 37, (1999) in press.
4. W. V. Kotlensky, in Chemistry and Physics of Carbon, Vol. 9, ed. P. L. Walker, and P. A. Thrower, Marcel Dekker, New York, 1973, p.173.
5. W. Benzinger, A. Decker, K. J. Huettinger, Carbon 34, (1996) 997.
6. A. Becker, K. J. Hueitinger, a) Carbon 36, (1998) 177.
7. b) Carbon 36, (1998) 201.
8. Carbon 36, (1998) 213.
9. Carbon 36, (1998) 225.
10. M. Brueggert, Z. Hu, K. J. Huettinger, submitted to Carbon.
11. M. Teubner, Z. Hu, K. J. Huettinger, submitted to Adv. Mater.-CVD.
12. Y. Antes, Z. Hu, W. Zhang, K. J. Huettinger, submitted to Carbon.
13. K. J. Huettinger, Adv. Mater. -CVD 4, (1998) 151.
14. T. J. Hirt, and H. B. Palmer, Carbon l, (1963) 65.
15. M. Tuebner, Y. Antes, Z. Hu, W. Zhang, K. J. Huettinger, this conference.
16. W. Benzinger, K. J. Huettinger, this conference.
17. A. Becker, Ph. D. thesis, University of Karlsruhe, Germany, (1997) p.l 17.
18. W. Benzinger, K. J. Huettinger, Carbon 37, (1999) in press.
19. R. O. Grisdale, A. C. Pfister and W. Van Roosbroeck, Bell System Tech. J. 24, (1953) 1082.
20. D. B. Murphy, H. B. Palmer and C. R. Kinney, in Industrial Carbon and Graphite, Society of Chemical Industry, London, (1958) p.77.
21. K. J. Huettinger and W. F. Merdes, Carbon 30, (1992) 883.
22. S. Dapprich, University of Karlsruhe, personal communication.
23. H. Andrae, K. J. Huettinger, this conference.