Irradiation-induced decomposition of Al2O3 during Auger electron spectroscopy analysis

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 2, 1996, Pages 286-292

  Park, Jae Won ^a   Pedraza, Anthony J ^a   Allen, William R ^b  

^a University of Tennessee Knoxville   (United States)

^b Martin Marietta Energy Systems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030530189     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579890     Document Type: Article

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