Cross-section analysis of electric devices by scanning capacitance microscope

Microelectronics Reliability

Volumn 39, Issue 6-7, 1999, Pages 987-990

  Takasaki, Yoichi ^a   Yamamoto, Takuma ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; CMOS INTEGRATED CIRCUITS; DYNAMIC RANDOM ACCESS STORAGE; EFFICIENCY; FIELD EFFECT SEMICONDUCTOR DEVICES; MICROSCOPES; SENSORS;

CROSS SECTION ANALYSIS; ELECTRICAL CARRIER IMAGE; GATE VOLTAGE; SCANNING CAPACITANCE MICROSCOPE; SCANNING PROBE MICROSCOPE;

CARRIER CONCENTRATION;

EID: 0033143164     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(99)00135-3     Document Type: Article

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