Improved quality of zinc oxide thin films by in situ annealing

Journal of Micromechanics and Microengineering

Volumn 6, Issue 1, 1996, Pages 63-65

  Bak Mikkelsen, Erik ^a   De Reus, Roger ^a   Bouwstra, Siebe ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC CONDUCTIVITY; IN SITU PROCESSING; PASSIVATION; REFRACTIVE INDEX; RESIDUAL STRESSES; SPUTTERING; ZINC OXIDE;

C AXIS ORIENTATION;

THIN FILMS;

EID: 0030092212     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/6/1/013     Document Type: Article

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