Stationary hillocks on etching silicon

Journal of Micromechanics and Microengineering

Volumn 9, Issue 2, 1999, Pages 180-185

  Elwenspoek, M ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTAL ORIENTATION; CRYSTALLINE MATERIALS; ETCHING; POTASSIUM COMPOUNDS; STABILITY;

ETCH FRONTS; HILLOCKS;

SILICON WAFERS;

EID: 0033138320     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/9/2/319     Document Type: Article

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