In-situ elevated temperature imaging of thin films with a microfabricated hot stage for scanning probe microscopes

Applied Surface Science

Volumn 141, Issue 1-2, 1999, Pages 119-128

  Dibattista, Michael ^a   Patel, Sanjay V ^a   Mansfield, John F ^a   Schwank, Johannes W ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

AFM; Hot stage; PG; SB20; SPM; Thin films

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRODES; HIGH TEMPERATURE PROPERTIES; PLATINUM; SURFACE PHENOMENA; SURFACE ROUGHNESS; THIN FILMS; TITANIUM;

HOT STAGE MICROFABRICATION; SCANNING PROBE MICROSCOPY (SPM);

METALLIC FILMS;

EID: 0033100143     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(98)00603-5     Document Type: Article

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