Resistance measurements of platinum-titania thin film gas detectors in ultra-high vacuum (UHV) and reactive ion etcher (RIE) systems

Sensors and Actuators, B: Chemical

Volumn 41, Issue 1-3, 1997, Pages 143-151

  Walton, R M ^a   Liu, H ^a   Gland, J L ^a   Schwank, J W ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Gas sensors; Platinum; TiO2 thin films

Indexed keywords

GAS SENSING ELECTRODES; HYDROGEN; OXIDATION; PLATINUM; SILICON; THIN FILM DEVICES; TITANIUM DIOXIDE;

THIN FILM GAS DETECTORS;

OXYGEN SENSORS;

EID: 0031169345     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)80287-0     Document Type: Article

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