Thermodynamic analysis of solid-state metal/Si interfacial reactions

Journal of Materials Research

Volumn 14, Issue 3, 1999, Pages 1002-1017

  Lee, Byeong Joo ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COBALT; CRYSTALLINE MATERIALS; NICKEL; NUCLEATION; SILICON; SILICON COMPOUNDS; SURFACE CHEMISTRY; THERMODYNAMIC STABILITY; TITANIUM;

SILICIDE;

INTERFACES (MATERIALS);

EID: 0033099627     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/JMR.1999.0134     Document Type: Article

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