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Volumn 5, Issue 3, 1999, Pages 433-440
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A Fourier optics model of two-beam scanning laser interferometers
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Author keywords
[No Author keywords available]
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Indexed keywords
GAUSSIAN BEAMS;
INTERFEROMETERS;
LASER INTERFEROMETRY;
LIGHT;
BEAM-SCANNING;
COHERENT BEAMS;
HIGH-ACCURACY;
LASER METROLOGY;
MONOCHROMATIC BEAM;
OPTICS MODELING;
PLANE WAVE;
SCANNING LASER INTERFEROMETERS;
SPATIAL PERIODICITY;
TWO BEAMS;
SYSTEMATIC ERRORS;
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EID: 0033098374
PISSN: 14346060
EISSN: None
Source Type: Journal
DOI: 10.1007/s100530050275 Document Type: Article |
Times cited : (31)
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References (18)
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