Beam-astigmatism in laser interferometry

IEEE Transactions on Instrumentation and Measurement

Volumn 46, Issue 2, 1997, Pages 196-200

  Bergamin, Angelo ^a   Cavagnero, Giovanni ^a   Cordiali, Laura ^b   Mana, Giovanni ^a  

^a Istituto di Metrologia Gustavo Colonnetti   (Italy)

^b POLITECNICO DI TORINO   (Italy)

Author keywords

Diffraction; Gaussian beam; Laser interferometry; Precision measurements

Indexed keywords

CRYSTAL LATTICES; ELECTROMAGNETIC WAVE DIFFRACTION; INTERFEROMETERS; LASER APPLICATIONS; LASER BEAMS; SILICON; X RAYS;

GAUSSIAN BEAMS; LASER INTERFEROMETRY; LIGHT WAVEFRONT ASTIGMATISM EFFECT; X RAY INTERFEROMETRY;

INTERFEROMETRY;

EID: 0031119364     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.571811     Document Type: Article

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