Deposition of PZT thin films by excimer laser ablation for piezoelectric application

Ferroelectrics

Volumn 224, Issue 1-4, 1999, Pages 267-273

  Kikuchi, Kaoru ^a   Wang, Zhanjie ^a   Umezawa, Akihiko ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CRACK INITIATION; DEPOSITION; EXCIMER LASERS; HIGH TEMPERATURE APPLICATIONS; LASER ABLATION; LEAD COMPOUNDS; PEROVSKITE; PIEZOELECTRIC DEVICES; SCANNING ELECTRON MICROSCOPY; THIN FILM DEVICES; X RAY DIFFRACTION ANALYSIS;

EXCIMER LASER ABLATION; LEAD ZIRCONATE TITANATE; MICRO ELECTRO MECHANICAL SYSTEM; PEAL OFF EFFECT; PEROVSKITE PHASE; PYROCLORE PHASE; THIN FILM PIEZOELECTRIC ACTUATORS;

THIN FILMS;

EID: 0033086565     PISSN: 00150193     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1080/00150199908210576     Document Type: Article

References (10)

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