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Volumn 438, Issue , 1996, Pages 639-644
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Preparation of TiC and TiC/DLC multilayers by metal plasma immersion ion implantation and deposition: relationship between composition, microstructure and wear properties
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Author keywords
[No Author keywords available]
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
COMPOSITION;
DEPOSITION;
FILM PREPARATION;
ION IMPLANTATION;
MICROSTRUCTURE;
PLASMA APPLICATIONS;
PLASMA SOURCES;
TITANIUM CARBIDE;
TRANSMISSION ELECTRON MICROSCOPY;
WEAR OF MATERIALS;
X RAY PHOTOELECTRON SPECTROSCOPY;
BONDING STATES;
DIAMOND LIKE CARBON FILMS;
FRICTION COEFFICIENT;
PULSED BIAS VOLTAGE;
MULTILAYERS;
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EID: 0030362277
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-438-639 Document Type: Conference Paper |
Times cited : (5)
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References (9)
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