Characterization of the arc evaporation of a hot boron cathode

Surface and Coatings Technology

Volumn 112, Issue 1-3, 1999, Pages 43-47

  Richter, F ^a   Flemming, G ^a   Kuhn M ^a   Peter, S ^a   Wagner, H ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Boron nitride; Cathodic arc evaporation; Charge state distribution; Discharge mode; Ion energy

Indexed keywords

BORON; EVAPORATION; HIGH SPEED PHOTOGRAPHY; IONS; KINETIC ENERGY; MASS SPECTROMETRY; MOLTEN MATERIALS; SURFACE PHENOMENA;

CATHODIC ARC EVAPORATION; CHARGE STATE DISTRIBUTION; HOT BORON CATHODE; ION ENERGY ANALYSIS;

CATHODES;

EID: 0033076592     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(98)00805-6     Document Type: Article

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