70 cm radio frequency hollow cathode plasma source for modification of foils and membranes

Surface and Coatings Technology

Volumn 97, Issue 1-3, 1997, Pages 759-767

  Korzec, D ^a   Mildner, M ^a   Hillemann, F ^a   Engemann, J ^a  

^a UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

Hollow cathode discharge; Plasma sources; Radio frequency; Surface modification

Indexed keywords

ANODES; CATHODES; CELLULOSE; CONTACT ANGLE; POLYPROPYLENES; PROBES; SURFACE DISCHARGES; SURFACE TREATMENT;

DOUBLE LANGMUIR PROBE TECHNIQUES; POLYPROPELENE FOILS; RADIO FREQUENCY HOLLOW CATHODE DISCHARGES (HCD);

PLASMA SOURCES;

EID: 0031388949     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(97)00324-1     Document Type: Article

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