Quantitative analysis of ultrathin doping layers in semiconductors using high-angle annular dark field images

Journal of Microscopy

Volumn 194, Issue 1, 1999, Pages 171-182

  Liu, C P ^a   Preston, A R ^a   Boothroyd, C B ^a   Humphreys, C J ^a  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

Author keywords

Coherence; HAADF; InAsP; Semiconductors; STEM; Ultrathin doping layers; Z contrast

Indexed keywords

COHERENT SCATTERING; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; INCOHERENT SCATTERING; INDIUM ANTIMONIDES; INDIUM ARSENIDE; INDIUM PHOSPHIDE; LATTICE MISMATCH; NARROW BAND GAP SEMICONDUCTORS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DOPING;

ANNULAR DETECTORS; DOPING LAYERS; HIGH-ANGLE ANNULAR DARK FIELDS; HIGH-ANGLE ANNULAR DARK-FIELD IMAGES; SIMPLE++; STEM; ULTRA-THIN; ULTRATHIN DOPING LAYER; Z CONTRASTS; Z-DIRECTIONS;

III-V SEMICONDUCTORS;

ARTICLE; CALCULATION; IMAGE ANALYSIS; IMAGING; MATHEMATICAL ANALYSIS; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0033005719     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.1999.00458.x     Document Type: Article

References (23)

1. Anderson, S.C., Birkeland, C.R., Anstis, G.R. & Cockayne, D.J.H. (1997) An approach to quantitative compositional profiling atnear-atomic resolution using high-angle annular dark fieldimaging. Ultramicroscopy, 69, 83-103.
2. Bollig, B., Fischer, H.G. & Kubalek, E. (1996) Multislice simulation of high-resolution scanning-transmission electron-microscopyz-contrast images of semiconductor heterointerfaces. Scanning,18, 291-300.
3. Brown, P.D., Bithell, E.G., Humphreys, C.J., Skevington, P.J.,Cannard, P.J. & Davies, G.J. (1993) The effect of growth interrupts on CBE grown InP. Inst. Phys. Conf. Ser. 134, 373-376.
4. Doyle, P.A. & Turner, P.S. (1968) Relativistic Hartree Fock X-ray and electron scattering factors. Acta Crystallogr. A24, 390-397.
5. Fleischmann, H. (1960) Zur Kleinwinkeltheorie der Vielfachstreuung. Z. Naturforsch. 15a, 1090-1096.
6. Gibson, J.M. & Howie, A. (1978) Investigation of local structure and composition in amorphous solids by high resolution electron microscopy. Chem. Scripta, 14, 109-116.
7. Hillyard, S., Loane, R.F. & Silco, xJ. (1993) Annular dark-field imaging: resolution and thickness effects. Ultramicroscopy, 49, 14-25.
8. Jesson, D.E. & Pennycook, S.J. (1993) Incoherent imaging of thin specimens using coherently scattered electrons. Proc. R. Soc. London Ser. A, 441, 261-281.
9. Jesson, D.E. & Pennycook, S.J. (1995) Incoherent imaging of crystals using thermally scattered electrons. Proc. R. Soc. London Ser. A, 449, 273-293.
10. Kirkland, E.J., Loane, R.F. & Silcox, J. (1987) Simulation of annular dark field stem images using a modified multislice method. Ultramicroscopy, 23, 77-96.
11. Kopf, D.A. (1981) Measurement of the intensity distribution in a STEM probe. Optik, 59, 89-110.
12. Liu, C.P., Dunin-Borkowski, R.E., Boothroyd, C.B., Brown, P.D. & Humphreys, C.J. (1997) Characterization of ultrathin doping layers in semiconductors. Microsc. Microanal. 3, 352-363.
13. Moliere, G. (1947) Theorie der Streuung schneller geladener Teilchen I: Einzelstreuung am abgeschirmten Coulomb-feld. Z. Naturforsch. 2a, 133-145.
14. Nellist, P.D. & Pennycook, S.J. (1998) Accurate structure determination from image reconstruction in ADF STEM. J. Microsc. 190, 159-170.
15. Pennycook, S.J., Berger, S.D. & Culbertson, R.J. (1986) Elemental mapping with elastically scattered electrons. J. Microsc. 144, 229-249.
16. Pennycook, S.J. & Jesson, D.E. (1990) High-resolution incoherent imaging of crystals. Phys. Rev. Lett. 64, 938-941.
17. Pennycook, S.J. & Jesson, D.E. (1991) High-resolution Z-contrast imaging of crystals. Ultramicroscopy, 37, 14-38.
18. Pennycook, S.J., Jesson, D.E.; & Chishalm, M.F. (1990) Atomic scale imaging of the structure and chemistry of semiconductor interface by Z contrast STEM. SPIE, 1284, 182-194.
19. Reid, J.S. (1983) Debye- Waller factors of zinc-blende-structure materials - a lattice dynamical comparison. Acta Crystallogr. A39, 1-13.
20. Rez, D., Rez, P. & Grant, I.P. (1994) Dirac-Fock calculations of X-ray-scattering factors and contributions to the mean inner potential for electron-scattering. Acta Crystallogr. A50, 481-497.
21. Treacy, M.M.J. & Gibson, J.M. (1993) Coherence and multiple-scattering in Z-contrast images. Ultramicroscopy, 52, 31-53.
22. Wang, Z.L. & Cowley, J.M. (1989) Simulating high-angle annular dark-field stem images including inelastic thermal diffuse- scattering. Ultramicroscopy, 31, 437-454.
23. Zeitler, E. & Olsen, H. (1967) Complex scattering amplitudes in elastic electron scattering. Phys. Rev. B162, 1439-1447.