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Volumn 194, Issue 2-3, 1999, Pages 558-560
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Fabrication and observation of a standard sample for near-field optical microscopy
a
HITACHI LTD
(Japan)
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Author keywords
Near field optical microscope; Resolution; Scanning probe lithography; Standard sample
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Indexed keywords
MICROSCOPES;
NEAR FIELD SCANNING OPTICAL MICROSCOPY;
GAP WIDTHS;
MEASUREMENTS OF;
NEAR FIELD OPTICAL MICROSCOPE;
NEAR FIELD OPTICAL MICROSCOPY;
OPTICAL RESOLUTION;
RESOLUTION;
SCANNING PROBE LITHOGRAPHY;
STANDARD SAMPLES;
FABRICATION;
CONFERENCE PAPER;
IMAGE QUALITY;
LASER;
MEASUREMENT;
MICROSCOPY;
OPTICS;
PRIORITY JOURNAL;
SCANNING NEAR FIELD OPTICAL MICROSCOPY;
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EID: 0032987672
PISSN: 00222720
EISSN: None
Source Type: Journal
DOI: 10.1046/j.1365-2818.1999.00561.x Document Type: Conference Paper |
Times cited : (1)
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References (7)
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