Fabrication and observation of a standard sample for near-field optical microscopy

Journal of Microscopy

Volumn 194, Issue 2-3, 1999, Pages 558-560

  Kato, Midori ^a   Kiguchi, M ^a   Ishibashi, M ^a   Heike, S ^a  

^a HITACHI LTD   (Japan)

Author keywords

Near field optical microscope; Resolution; Scanning probe lithography; Standard sample

Indexed keywords

MICROSCOPES; NEAR FIELD SCANNING OPTICAL MICROSCOPY;

GAP WIDTHS; MEASUREMENTS OF; NEAR FIELD OPTICAL MICROSCOPE; NEAR FIELD OPTICAL MICROSCOPY; OPTICAL RESOLUTION; RESOLUTION; SCANNING PROBE LITHOGRAPHY; STANDARD SAMPLES;

FABRICATION;

CONFERENCE PAPER; IMAGE QUALITY; LASER; MEASUREMENT; MICROSCOPY; OPTICS; PRIORITY JOURNAL; SCANNING NEAR FIELD OPTICAL MICROSCOPY;

EID: 0032987672     PISSN: 00222720     EISSN: None     Source Type: Journal    
DOI: 10.1046/j.1365-2818.1999.00561.x     Document Type: Conference Paper

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