A novel (SiC)1-x(AlN)x compound synthesized using ion beams

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 147, Issue 1-4, 1999, Pages 273-278

  Pezoldt, J ^a   Yankov, R A ^a,b,c   Mucklich A ^c   Fukarek, W ^c   Voelskow, M ^c   Reuther, H ^c   Skorupa, W ^c  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b CCR GmbH   (Germany)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Aluminum nitride; Ion beam synthesis; Polytypism; Silicon carbide; Solid solutions

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; CRYSTALS; INFRARED SPECTROSCOPY; NITRIDES; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON CARBIDE; SOLID SOLUTIONS; SYNTHESIS (CHEMICAL); TRANSMISSION ELECTRON MICROSCOPY;

ALUMINUM NITRIDE; ION CHANNELING SPECTROSCOPY; POLARIZED INFRARED REFLECTION SPECTROSCOPY; POLYTYPISM;

ION IMPLANTATION;

EID: 0032713647     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(98)00573-4     Document Type: Article

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