Hydrogen platelets in crystalline silicon - precursors for the `smart cut'

Diffusion and Defect Data Pt.B: Solid State Phenomena

Volumn 69, Issue , 1999, Pages 83-92

  Reboredo, F A ^a,c   Pantelides, S T ^a,b  

^a VANDERBILT UNIVERSITY   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

^c NATIONAL RENEWABLE ENERGY LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NUCLEATION; SEMICONDUCTOR GROWTH; SILICON ON INSULATOR TECHNOLOGY;

HYDROGEN PLATELETS;

SEMICONDUCTING SILICON;

EID: 0032691231     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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