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Journal of Materials Science: Materials in Electronics

Volumn 10, Issue 3, 1999, Pages 209-213

Grazing incidence reciprocal space mapping of partially relaxed SiGe films

(1) Mooney, P M a

a IBM T J WATSON RESEARCH CENTER (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; INTERFACES (MATERIALS); SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE STRUCTURES; STRAIN; STRESS RELAXATION; SURFACE ROUGHNESS; X RAY CRYSTALLOGRAPHY;

LATTICE MISMATCH; SILICON GERMANIDE; STRAIN RELAXATION;

SEMICONDUCTING FILMS;

EID: 0032688558 PISSN: 09574522 EISSN: None Source Type: Journal
DOI: 10.1023/A:1008900129541 Document Type: Article

Times cited : (2)

References (13)

1
- 0042317208
- B. S. MEYERSON, D. L. HARAME, J. STORK, E. CRABBE, J. COMFORT and G. PATTON, Int. J. High Speed Electron. Syst. 5 (1994) 473; B. S. MEYERSON, Proc. IEEE 40 (1992) 1592.
- (1994) Int. J. High Speed Electron. Syst. , vol.5 , pp. 473
- Meyerson, B.S.¹ Harame, D.L.² Stork, J.³ Crabbe, E.⁴ Comfort, J.⁵ Patton, G.⁶

2
- 33746991507
- B. S. MEYERSON, D. L. HARAME, J. STORK, E. CRABBE, J. COMFORT and G. PATTON, Int. J. High Speed Electron. Syst. 5 (1994) 473; B. S. MEYERSON, Proc. IEEE 40 (1992) 1592.
- (1992) Proc. IEEE , vol.40 , pp. 1592
- Meyerson, B.S.¹

3
- 0344127195
- K. ISMAIL, S. RISHTON, J. O. CHU, K. CHAN, S. F. NELSON and B. S. MEYERSON, IEEE Electron Device Lett. EDL-14 (1994) 473.
- (1994) IEEE Electron Device Lett. , vol.EDL-14 , pp. 473
- Ismail, K.¹ Rishton, S.² Chu, J.O.³ Chan, K.⁴ Nelson, S.F.⁵ Meyerson, B.S.⁶

4
- 0030399546
- M. ARAFA, K. ISMAIL, J. O. CHU, B. S. MEYERSON and I. ADESIDA, ibid. EDL-17 (1996) 1.
- (1996) IEEE Electron Device Lett. , vol.EDL-17 , pp. 1
- Arafa, M.¹ Ismail, K.² Chu, J.O.³ Meyerson, B.S.⁴ Adesida, I.⁵

5
- 0030287605
- and references therein
- P. M. MOONEY, Mater. Sci. Eng. Rep. R17 (1996) 105 and references therein.
- (1996) Mater. Sci. Eng. Rep. , vol.R17 , pp. 105
- Mooney, P.M.¹

6
- 3343007423
- J. TERSOFF and F. K. LEGOUES, Phys. Rev. Lett. 72 (1994) 3570.
- (1994) Phys. Rev. Lett. , vol.72 , pp. 3570
- Tersoff, J.¹ Legoues, F.K.²

7
- 0001390252
- J. E. JESSON, S. J. PENNYCOOK, J.-M. BARIBEAU and D. C. HAUGHTON, ibid. 71 (1993) 1744.
- (1993) Phys. Rev. Lett. , vol.71 , pp. 1744
- Jesson, J.E.¹ Pennycook, S.J.² Baribeau, J.-M.³ Haughton, D.C.⁴

8
- 84957349716
- A. G. CULLIS, D. J. ROBBINS, S. J. BARNETT and A. PIDDUCK, J. Vac. Sci. Technol. A 12 (1994) 1924.
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1924
- Cullis, A.G.¹ Robbins, D.J.² Barnett, S.J.³ Pidduck, A.⁴

9
- 0343371987
- F. K. LEGOUES, B. S MEYERSON and J. F. MORAR, Phys. Rev Lett. 66 (1991) 2903; F. K. LEGOUES, B. S. MEYERSON, J. F. MORAR and P. D. KIRCHNER, J. Appl. Phys. 71 (1992) 4230.
- (1991) Phys. Rev Lett. , vol.66 , pp. 2903
- Legoues, F.K.¹ Meyerson, B.S.² Morar, J.F.³

10
- 28444459024
- F. K. LEGOUES, B. S MEYERSON and J. F. MORAR, Phys. Rev Lett. 66 (1991) 2903; F. K. LEGOUES, B. S. MEYERSON, J. F. MORAR and P. D. KIRCHNER, J. Appl. Phys. 71 (1992) 4230.
- (1992) J. Appl. Phys. , vol.71 , pp. 4230
- Legoues, F.K.¹ Meyerson, B.S.² Morar, J.F.³ Kirchner, P.D.⁴

11
- 0028497335
- M. A. LUTZ, R. M. FEENSTRA, P. M. MOONEY, J. TERSOFF and J. O. CHU, Surf. Sci. 316 (1994) L1075.
- (1994) Surf. Sci. , vol.316
- Lutz, M.A.¹ Feenstra, R.M.² Mooney, P.M.³ Tersoff, J.⁴ Chu, J.O.⁵

12
- 0006228802
- J. L. JORDAN-SWEET, P. M. MOONEY, M. A. LUTZ, R. M. FEENSTRA, J. O. CHU and F. K. LEGOUES, J. Appl. Phys. 80 (1996) 89.
- (1996) J. Appl. Phys. , vol.80 , pp. 89
- Jordan-Sweet, J.L.¹ Mooney, P.M.² Lutz, M.A.³ Feenstra, R.M.⁴ Chu, J.O.⁵ Legoues, F.K.⁶

13
- 0029232020
- J. L. JORDAN-SWEET, P. M. MOONEY and G. B. STEPHENSON, Mater. Res. Soc. Symp. Proc. 375 (1995) 201.
- (1995) Mater. Res. Soc. Symp. Proc. , vol.375 , pp. 201
- Jordan-Sweet, J.L.¹ Mooney, P.M.² Stephenson, G.B.³

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