Rapid low temperature diode fabrication on p-type Czochralski silicon on the base of simple hydrogen enhanced thermal donor formation processes

Solid State Phenomena

Volumn 69, Issue , 1999, Pages 551-556

  Job, R ^a   Weima, J A ^a   Grabosch, G ^a   Borchert, D ^a   Fahrner, W R ^a   Raiko, V ^b   Ulyashin, A G ^c  

^a UNIVERSITY OF HAGEN   (Germany)

^b UNIVERSITY OF DUISBURG ESSEN   (Germany)

^c BELARUSIAN NATIONAL TECHNICAL UNIVERSITY   (Belarus)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL GROWTH FROM MELT; SEMICONDUCTOR DIODES; SEMICONDUCTOR GROWTH; SEMICONDUCTOR JUNCTIONS;

HYDROGEN ENHANCED THERMAL DONOR FORMATION PROCESSES; SPREADING RESISTANCE PROBES;

SILICON WAFERS;

EID: 0032685544     PISSN: 10120394     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.4028/www.scientific.net/ssp.69-70.551     Document Type: Article

References (13)

1. R. Job, D. Borchert, Y.A. Bumay, W.R. Fahrner, G. Grabosch, I.A. Khorunzhii, A.G. Ulyashin, MRS Symp. Proc. Series 469 (1997), p. 101.
2. A.G. Ulyashin, Y.A. Bumay, R. Job, G. Grabosch, D. Borchert, W.R. Fahrner, A.Y. Diduk, Solid State Phenomena 57-58 (1997) p. 189.
3. A.G. Ulyashin, Y.A. Bumay, R. Job, W.R. Fahrner, Appl. Phys. (A) 66 (1998) p. 399.
4. R. Job, W.R. Fahrner, N.M. Kazuchits, A.G. Ulyashin, MRS Symp. Proc. Series 513 (1997), p. 337.
5. A.R. Brown, M. Claybourn, R. Murray, P.S. Nandhra, R.C. Newman, J.H. Tucker, Semicond. Sci. Technol. 3 (1988) p. 591.
6. H.J. Stein, S.K. Hahn, Appl. Phys. Lett., 56 (1990) p. 63.
7. R. Murray, Physica B 170 (1991) p. 115.
8. S.J. Pearton, J.W. Corbett, M. Stavola, Hydrogen in Crystalline Semiconductors, Springer-Verlag, Berlin, Heidelberg, New York (1992).
9. S.M. Myers, M.I. Baskes, H.K. Birnbaum, J.W. Corbett, G.G. DeLeo, S.K. Estreicher, E.E. Haller, P. Jena, N.M. Johnson, R. Kirchheim, S.J. Pearton, M.J. Stavola, Rev. Mod. Phys. 64 (1992) p. 559.
10. A. Van Wieringen, N. Warmholtz, Physica 22 (1956) p. 849.
11. J.I. Pankove, N.M. Johnson, Hydrogen in Semiconductors, Academic Press, New York (1991)
12. D. Mathiot, Phys. Rev. B 40 (1989) p. 5867.
13. S.M. Sze, Physics of Semiconductor Devices, John Wiley & Sons, New York (1981).