Conducting barrier electrodes for direct contact of PZT thin films on tungsten

Journal of the Korean Physical Society

Volumn 32, Issue 4 SUPPL., 1998, Pages

  Maeder, T ^a   Muralt, P ^a   Sagalowicz, L ^a   Setter, N ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032363049     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (13)

1. P. Muralt et al., Sensors and Actuators A48, 157 (1995).
2. R. Takayama, Y. Tomita, K. Iijima and I. Ueda, Ferroelectrics 118, 325 (1991).
3. R. E. Jones et al., Microelectronic Engineering 29, 3 (1995).
4. S. A. Myers and E. R. Myers, Materials Research Symposium Proceedings 243 (Pittsburgh, 1992), p. 107.
5. G. J. M. Dormans et al., Microelectronic Engineering 29, 33 (1995).
6. T. Maeder et al., Appl. Phys. Lett. 68, 776 (1996).
7. T. Maeder, L. Sagalowicz and P. Muralt, Proceedings 6th European Conf. Appl. Surface and Interface Analysis ECASIA 95 (Wiley & Sons, 1995), p. 931.
8. G. A. G. M. Spierings, J. v. Zon, M. Klee and P. K. Larsen, Integrated Ferroelectrics 4, 283 (1992).
9. R. Bruchhaus, D. Pitzer, O. Eibl, U. Scheithauer and W. Hoesler, Materials Research Symposium Proceedings 243 (Pittsburgh, 1992), p. 123.
10. K. Sreenivas, I. Reaney, T. Maeder, N. Setter, C. Jagadish and R. G. Elliman, J. Appl. Phys. 75, 232 (1994).
11. G. R. Fox, S. Trolier-McKinstry, S. B. Krupanidhi and L. M. Casas, J. Mater. Res. 10, 1508 (1995).
12. K. H. Park, C. Y. Kim, Y. W. Jeong and H. J. Kwon, J. Mater. Res. 10, 1790 (1995).
13. U. R. Evans, The Corrosion and Oxidation of Metals: Scientific Principles and Practical Applications (Edward Arnold, London, 1960).