Depletion of surface boron of heavily boron-doped diamond films by annealing

Diamond and Related Materials

Volumn 8, Issue 6, 1999, Pages 1006-1010

  Wong, K W ^a,c   Huang, L J ^b   Hung, Y ^b   Lee, S T ^a   Kwok, R W M ^c  

^a CITY UNIVERSITY OF HONG KONG   (Hong Kong)

^b SEAGATE TECHNOLOGY   (United States)

^c CHINESE UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Annealing; Boron doped diamond; Depletion; Polycrystalline

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; BORON; DOPING (ADDITIVES); ELECTRONIC PROPERTIES; FERMI LEVEL; POLYCRYSTALLINE MATERIALS; SECONDARY ION MASS SPECTROMETRY; THERMAL EFFECTS; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

X RAY PHOTOELECTRON ENERGY LOSS SPECTROSCOPY;

DIAMOND FILMS;

EID: 0032674484     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00445-2     Document Type: Article

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