Optimization of multilayer thin film passivation processes for improving cache memory device performance

Journal of the Electrochemical Society

Volumn 146, Issue 4, 1999, Pages 1510-1516

  Lin, C F ^a   Tseng, W T ^b   Feng, M S ^c  

^a WINBOND ELECTRONICS CORPORATION   (Taiwan)

^b NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

BUFFER STORAGE; DEGRADATION; HOT CARRIERS; MULTILAYERS; PASSIVATION; PERFORMANCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; RELIABILITY; RESISTORS; SEMICONDUCTING SILICON COMPOUNDS;

CHARGE TRAPPING MECHANISMS; ETCH RATES; INTERLAYER DIELECTRIC; POLYLOAD RESISTOR;

THIN FILMS;

EID: 0032669508     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1391796     Document Type: Article

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