Real time optical correction using electrostatically actuated MEMS devices

Journal of Electrostatics

Volumn 46, Issue 2-3, 1999, Pages 91-101

  Horenstein, M ^a   Bifano, T ^b   Pappas, S ^a   Perreault, J ^a   Krishnamoorthy Mali, R ^b  

^a Boston University   (United States)

^b BOSTON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; FEEDBACK CONTROL; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL SYSTEMS; REAL TIME SYSTEMS; WAVEFRONTS;

ELECTROSTATIC ACTUATORS; IMAGE DISTORTIONS; OPTICAL CORRECTION SYSTEM;

ELECTROSTATIC DEVICES;

EID: 0032666343     PISSN: 03043886     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3886(99)00015-7     Document Type: Article

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