Influence of the heating ramp on the heteroepitaxial growth of SiC on Si

Materials Science and Engineering B

Volumn 61-62, Issue , 1999, Pages 553-558

  Cimalla, V ^a   Stauden, Th ^a   Eichhorn, G ^a   Pezoldt, J ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIFFUSION IN SOLIDS; MOLECULAR BEAM EPITAXY; NUCLEATION; SEMICONDUCTOR GROWTH; SILICON CARBIDE; SILICON WAFERS; THERMAL CYCLING;

HETEROEPITAXY; RAPID THERMAL CHEMICAL VAPOR DEPOSITION;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 0032661858     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-5107(98)00472-3     Document Type: Article

References (21)

1. Rimai L., Ager R., Weber W.H., Hangas J., Samman A., Zhu W. J. Appl. Phys. 77:1995;6601-6608.
2. Nakashima H., Sugano T., Yanai H. Jpn. J. Appl. Phys. 5:1966;874-878.
3. Ferro G., Monteil Y., Vincent H., Cauwet F., Bouix J., Durupt P., Olivier J., Bisaro R. Thin Solid Films. 278:1996;22-27.
4. Cimalla V. Dissertation (in German). 1998;Technical University Ilmenau.
5. Pezoldt J., Cimalla V., Stauden Th., Ecke G., Eichhorn G., Scharmann F., Schipanski D. Diam. Relat. Mater. 6:1997;1311-1315.
6. Hamza A.V., Balooch M., Moalem M. Surf. Sci. 317:1994;1129-1135.
7. Cimalla V., Karagodina J.K., Pezoldt J., Eichhorn G. Mater. Sci. Eng. B29:1994;170-175.
8. Dufour G., Rochet F., Stedile F.C., Poncey C., De Crescenzi M., Gunnella R., Froment M. Phys. Rev. B. 56:1997;4266-4282.
9. Hatayama T., Fuyuki T., Matsunami H. Inst. Phys. Conf. Ser. 142:1996;117-120.
10. Yoshinobu T., Fuyuki T., Matsunami H. Jpn. J. Appl. Phys. 30:1991;1086-1088.
11. Cimalla V., Pezoldt J., Ecke G., Rößler H., Eichhorn G. J. Phys. IV (Colloq) C5. 2:1995;863-870.
12. Stinespring C.D., Wormhoudt J.C. J. Appl. Phys. 65:1989;1733-1742.
13. V. Cimalla, T. Stauden, G. Ecke, F. Scharmann, S. Sloboshanin, J.A. Schaefer, G. Eichhorn, J. Pezoldt, Appl. Phys. Lett. 73 (1998) 3542-3544.
14. Bendler M., Moldenhauer F., Cimalla V., Pezoldt J. 42. Int. Wiss. Kolloq.; Ilmenau (in German); Bd. 3:1997;697-704.
15. Abramovitz M., Stegun I.A. Handbook of Mathematical Functions: With Formulas, Graphs, and Mathematical Tables, Table 5.1/5.2. 1970;Dover, New York.
16. Pezoldt J., Cimalla V. Conference: Advances in Rapid Thermal and Integrated Processing (NATO Advanced Study Institute) 3-14 July 1995, Maratea, Italy. 1995, unpublished work.
17. Romanus H., Cimalla V., Kromka A., Scheiner J., Spieß L., Pezoldt J. Mater. Sci. Eng. B. 47:1997;274-278.
18. Teichert G., Nennewitz O., Cimalla V., Pezoldt J. MRS Symp. Proc. 399:1995;17-22.
19. Cimalla V., Pezoldt J., Eichhorn G. Mater. Sci. Eng. B46:1997;199-202.
20. Steckl A.J., Li J.P. IEEE Trans. Electron. Dev. 39:1992;64-74.
21. Kitabatake M., Greene J.E. Jpn. J. Appl. Phys. 35:1996;5261-5273.