Surface reconstruction induced by a pulsed low-energy ion beam during Si(111) molecular beam epitaxy

Surface Science

Volumn 425, Issue 2, 1999, Pages 185-194

  Dvurechenskii, A V ^a   Zinovyev, V A ^a   Markov, V A ^a   Kudryavtsev, V A ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; COMPUTER SIMULATION; DIFFUSION; ION BEAMS; MOLECULAR BEAM EPITAXY; MONTE CARLO METHODS; MORPHOLOGY; PHASE TRANSITIONS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; RELAXATION PROCESSES; SEMICONDUCTING SILICON; SINGLE CRYSTALS;

ADATOM; ION SOLID INTERACTION; SURFACE RECONSTRUCTION; SURFACE RELAXATION; SURFACE SMOOTHNESS;

SURFACE STRUCTURE;

EID: 0032655920     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0039-6028(99)00176-4     Document Type: Article

References (18)

1. Rabalais J.W., Al-Bayati A.H., Boyd K.J., Marton D. Phys. Rev. B. 53:1996;10781.
2. Park S.W., Shim J.Y., Baik H.K. J. Appl. Phys. 78:1995;5993.
3. Markov V.A., Pchelyakov O.P., Sokolov L.S., Stenin S.I., Stoyanov S. Surf. Sci. 250:1991;229.
4. Dvurechenskii A.V., Zinovyev V.A., Markov V.A., Grötzschel R., Heinig K.-H. JETP Lett. 64:1996;742.
5. Dvurechenskii A.V., Markov V.A., Zinovyev V.A., Zinovyeva A.F., Grötzschel R., Heinig K.-H. Scheffler M. 23rd International Conference on the Physics of Semiconductors. 2:1996;1127 World Scientific, Singapore.
6. Vvedensky D.D., Clarke S. Surf. Sci. 373:1990;225.
7. Yokotsuka T., Wilby M.R., Vvedensky D.D., Kawamura T., Fukutani K., Ino S. Appl. Phys. Lett. 62:1993;1673.
8. Hansson G.V., Larsson M.I. Surf. Sci. 321:1994;1255.
9. Nakahara H., Ichimiya A. Surf. Sci. 241:1991;124.
10. Köhler U., Demuth J.E., Hamers J. J. Vac. Sci. Technol. A. 7:1989;2860.
11. Nakahara H., Ichimiya A. J. Crystal Growth. 99:1990;514.
12. Zinoviev V.A., Aleksandrov L.N., Dvurechenskii A.V., Heinig K.-H., Stock D. Thin Solid Films. 241:1994;167.
13. Larsson M.I., Björklund L.-E., Hansson G.V. Bean J.C., Iyer S.S., Wang K.L. Silicon-Molecular Beam Epitaxy. 220:1991;49 MRS Proceedings, Pittsburgh.
14. Larsson M.I., Hansson G.V. Surf. Sci. 292:1993;98.
15. Bedrossian P., Houston J.E., Tsao J.Y., Chason E., Picraux S.T. Phys. Rev. B. 44:1991;13783.
16. Dvurechenskii A.V., Zinovyev V.A., Faizullina A.F. Surf. Sci. 347:1996;111.
17. Strickland B., Roland C. Phys. Rev. B. 51:1995;5091.
18. Voiglander B., Zinner A., Weber T., Bonzel H.P. Phys. Rev. B. 51:1995;7583.