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Volumn 11, Issue 6, 1999, Pages 501-505
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Role of the thermal oxide in GaAs-based photonic bandgap waveguide microcavities
b a b a a a a,b b
b
USA
(United States)
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Author keywords
[No Author keywords available]
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Indexed keywords
ENERGY GAP;
ETCHING;
LIGHT TRANSMISSION;
REFRACTIVE INDEX;
SEMICONDUCTING GALLIUM ARSENIDE;
SEMICONDUCTOR DEVICES;
THERMOOXIDATION;
OPTICAL MICROCAVITIES;
OPTICAL WAVEGUIDES;
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EID: 0032651922
PISSN: 09359648
EISSN: None
Source Type: Journal
DOI: 10.1002/(SICI)1521-4095(199904)11:6<501::AID-ADMA501>3.0.CO;2-H Document Type: Article |
Times cited : (5)
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References (11)
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