Study on the evolution and nature of interstitial-type defects following proton and alpha particle implantation during low-dose proximity gettering of platinum

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 155, Issue 1, 1999, Pages 60-66

  Schmidt, D C ^a,b   Svensson, B G ^b   Barbot, J F ^a   Blanchard, C ^a  

^a UNIVERSITÉ DE POITIERS   (France)

^b ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

ALPHA PARTICLES; ANNEALING; BAND STRUCTURE; DIFFUSION IN SOLIDS; HYDROGEN; ION BOMBARDMENT; ION IMPLANTATION; PLATINUM; POINT DEFECTS; PROTON IRRADIATION; SILICON; THERMAL EFFECTS;

ALPHA PARTICLE IMPLANTATION; INTERSTITIALS; PROTON IMPLANTATION;

RADIATION DAMAGE;

EID: 0032649131     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(99)00292-X     Document Type: Article

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