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Thin Solid Films

Volumn 343-344, Issue 1-2, 1999, Pages 370-373

Modeling of SiO2/Si(100) interface structure by using extended -Stillinger-Weber potential

(2) Watanabe, Takanobu a Ohdomari, Iwao a

a WASEDA UNIVERSITY (Japan)

Author keywords

Computer simulation; Interfaces; Oxidation; Silicon; Silicon oxide

Indexed keywords

CHEMICAL BONDS; COMPUTER SIMULATION; CRYSTAL ATOMIC STRUCTURE; CRYSTAL ORIENTATION; OXIDATION; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR DEVICE STRUCTURES; SILICA; SILICON WAFERS; ULTRATHIN FILMS;

STILLINGER-WEBER POTENTIAL;

SEMICONDUCTING FILMS;

EID: 0032648681 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/S0040-6090(98)01700-3 Document Type: Article

Times cited : (41)

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