300-mm-Aperture phase-shifting Fizeau interferometer

Optical Engineering

Volumn 38, Issue 8, 1999, Pages 1371-1380

  Fairman, Philip S ^a   Ward, Barry K ^a   Oreb, Bozenko F ^a   Farrant, David I ^a   Gilliand, Yves ^b   Freund, Christopher H ^a   Leistner, Achim J ^a   Seckold, Jeffrey A ^a   Walsh, Christopher J ^a  

^a CSIRO   (Australia)

^b R and D Optical Metrology   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; OPTICAL MATERIALS; OPTICAL VARIABLES MEASUREMENT; PHASE SHIFT;

PHASE-SHIFTING FIZEAU INTERFEROMETER;

INTERFEROMETERS;

EID: 0032647540     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.602180     Document Type: Article

References (21)

1. A. J. Leistner, "Teflon polishers: their manufacture and use," Appl. Opt. 15(2), 293-298 (1976).
2. J. Chen and K. Murata, "Digital phase measuring Fizeau interferometer for testing of flat and spherical surfaces," Optik (Stuttgart) 81(1), 28-32 (1988).
3. K. Creath, "Phase measurement interferometry techniques," Prog. Opt. 26, 349-393 (1988).
4. J. E. Grievenkamp and J. H. Brunning, "Phase shifting interferometry," Chap. 14 in Optical Shop Testing, 2nd ed., D. Malacara, Ed., Wiley (1992).
5. P. Hariharan, "Interferometric measurements of small-scale surface irregularities: sources of errors," Opt. Eng. 36(8), 2330-2334 (1997).
6. K. Hibino, B. F. Oreb, D. I. Farrant, and K. G. Larkin, "Phase shifting algorithms for nonlinear and spatially nonuniform phase shifts," J. Opt. Soc. Am. A 14(4), 918-930 (1997).
7. K. G. Larkin and B. F. Oreb, "Design and assessment of symmetrical phase shifting algorithms," J. Opt. Soc. Am. A 9(10), 1740-1748 (1992).
8. P. Hariharan, "Phase-stepping interferometry with laser diodes. 2: Effects of laser wavelength modulation," Appl. Opt. 28(10), 1749-1750 (1989).
9. G. Schultz and J. Schwider, "Interferometric testing of smooth surfaces," Chap. 4 in Progress in Optics 13, E. Wolf, Ed., North-Holland Publishing Company, Amsterdam (1976).
10. R. E. Parks, "Removal of test optics errors," Proc. SPIE 153, 56-63 (1978).
11. L. Shao, R. E. Parks, and C. Ai, "Absolute testing of flats using four data sets," Proc. SPIE 1776, 94-97 (1992).
12. G. Schulz and J. Grzanna, "Absolute flatness testing by the rotation method with optimal measuring error compensation," Appl. Opt. 31, 3767-3780 (1992).
13. K. E. Elssner, A. Vogel, J. Grzanna, and G. Schulz, "Establishing a flatness standard," Appl. Opt. 33, 2437-2446 (1994).
14. C. J. Evans and R. N. Kestner, "Test optics error removal," Appl. Opt. 35, 1015-1021 (1996).
15. M. Küchel, "Two new principles for absolute interferometric testing of planes," in International Workshop on Interferometry (IWI'96), pp. 73-76 (1996), Wako Saitama, Japan, Technical Digest AP962223.
16. C. J. Walsh, A. J. Leistner, J. Seckold, B. F. Oreb, and D. I. Farrant, "Fabrication and measurement of optics for LIGO," Appl. Opt. 38, 2870-2879 (1999).
17. C. J. Wyant, "Absolute optical testing: better accuracy than the reference," Photonics Spectra, 97-101 (1991).
18. P. Hariharan, "Optical flat surfaces: direct interferometric measurements of small-scale irregularities," Opt. Eng. 35(11), 3265-3266 (1996).
19. Veeco Inc., "Vision" software, 2650 East Elvira Rd., Tucson, AZ 85706. Mention of this product does not constitute endorsement by CSIRO.
20. B. F. Oreb, K. G. Larkin, P. Fairman, and M. Ghaffari, "Moiré based optical surface profiler for the minting industry," in SPIE Conf. on Interferometry: Surface Characterization and Testing, Proc. SPIE 1776, 48-57 (1992).
21. S. Whitcomb, G. Billingsley, J. Carri, A. Golovitser, D. Jungwirth, W. Kells, H. Yamamoto, B. Bochner, Y. Hefetz, P. Saha, and R. Weiss, "Optics development for LIGO," LIGO publication LIGO-P960044-CO-D, presented at TAMA Workshop (1996), http:// www.ligo.caltech.edu/.