Optical flat surfaces: Direct interferometric measurements of small-scale irregularities

Optical Engineering

Volumn 35, Issue 11, 1996, Pages 3265-3266

  Hariharan, Parameswaran ^a  

^a CSIRO   (Australia)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037673910     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601065     Document Type: Article

References (4)

1. G. Schulz and J. Schwider, "Precise measurement of planeness," Appl. Opt. 6, 1077-1084 (1967).
2. G. Schulz and J. Schwider, "Interferometric testing of smooth surfaces," Chap. 4 in Progress in Optics, E. Wolf, Ed., Vol. XIII, pp. 95-167, North-Holland, Amsterdam (1976).
3. C. Ai and J. C. Wyant, "Absolute testing of flats by using even and odd functions," Appl. Opt. 32, 4698-4705 (1993).
4. A. Papoulis, Probability, Random Variables and Stochastic Processes, McGraw-Hill, New York (1965).