Fiber-optic tactile microsensor for detecting the position of the tip of a fiberscope

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 5, Issue 1, 1999, Pages 115-118

  Tohyama, O ^a   Maeda, S ^a   Itoh, H ^a  

^a Mitsubishi Cable Industries Ltd   (Japan)

Author keywords

Excimer lasers; Fiber optic sensors; Micromachining; Tactility measurement

Indexed keywords

ANISOTROPY; ETCHING; EXCIMER LASERS; FIBER OPTIC SENSORS; LIGHT REFLECTION; LIGHT TRANSMISSION; MICROMACHINING; MIRRORS; OPTICAL FIBERS; PLASTIC PIPE; POLYURETHANES; SILICON;

TACTILE SENSORS; TACTILITY MEASUREMENT;

MICROSENSORS;

EID: 0032638125     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.748114     Document Type: Article

References (10)

1. S. Maeda, K. Minami, and M. Esashi, "Excimer laser induced CVD and its application to selective nonplanar metallization," J. Micromech. Microeng, vol. 5, pp. 237-242, 1995.
2. J. Garvey, D. Beebe, and D. D. Denton, "Finite element modeling of a silicon tactile sensor," Sens. Mater., vol. 9, pp. 197-213, 1997.
3. A. S. Fiorillo, "A piezoresistive tactile sensor," IEEE Trans. Instrum. Meas., vol. 46, pp. 15-17, 1997.
4. M. Maezawa, T. Imahashi, Y. Kuroda, H. Adachi, and K. Yanagisawa, "Tactile sensing using piezoelectric resonators," in Tech. Dig., 9th Int. Conf. Solid-State Sensors and Actuators (Transducers'97), Chicago, IL, June 1997, pp. 117-120.
5. J. Volf, S. Holy, and J. Vlcek, "Use of tactile transducers for pressure-distribution measurement on the sole of the foot," Sens. Actuators, vol. A62, pp. 556-561, 1997.
6. L. Tenerz, B. Hok, and T. Engstrom, "0.5 mm diameter pressure sensor for biomedical applications," in Tech. Dig., 4th Int. Conf. Solid-State Sensors and Actuators (Transducers'87), Tokyo, Japan, June 1987, pp. 312-315.
7. O. Tohyama, M. Kohashi, K. Yamamoto, and H. Itoh, "A fiber-optic silicon pressure sensor for ultrathin catheters," Sens. Actuators, vol. A54, pp. 622-625, 1996.
8. O. Tohyama, M. Kohashi, M. Sugihara, and H. Itoh, "A fiber-optic pressure microsensor for biomedical applications," Sens. Actuators, vol. A66, pp. 150-154, 1998.
9. H. Niino and A. Yabe, "Excimer laser polymer ablation: Formation of a positively charged surface and its application in metallization of polymer films," Appl. Surf. Sci., vol. 692, pp. 1-6, 1993.
10. O. Tabata, R. Asahi, H. Funabashi, K. Shimaoka, and S. Sugiyama, "Anisotropie etching of silicon in TMAH solution," Sens. Actuators, vol. A34, pp. 51-57, 1992.