High electrical resistivity of CVD-diamond

Microelectronics Reliability

Volumn 39, Issue 2, 1999, Pages 269-273

  Manca, J V ^a   Nesladek, M ^a   Neelen, M ^a   Quaeyhaegens, C ^a   De Schepper, L ^a   De Ceuninck, W ^a  

^a HASSELT UNIVERSITY   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; ELECTRIC CONDUCTIVITY OF SOLIDS; FILM GROWTH; HEAT TREATMENT;

DIELECTRIC STRENGTH;

DIELECTRIC FILMS;

EID: 0032637957     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0026-2714(98)00225-X     Document Type: Article

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