Reconstruction of doping profiles in semiconductor materials using optical tomography

Solid-State Electronics

Volumn 43, Issue 4, 1999, Pages 761-769

  Zeni, Luigi ^a   Bernini, Romeo ^a   Pierri, Rocco ^a  

^a SECOND UNIVERSITY OF NAPLES   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; COMPUTER SIMULATION; REFRACTIVE INDEX; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR MATERIALS;

DRUDE-LORENZ MODEL; OPTICAL DIFFRACTION TOMOGRAPHY; SCATTERED FIELD INTENSITY;

SEMICONDUCTOR DOPING;

EID: 0032631823     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0038-1101(98)00328-1     Document Type: Article

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