Integrated multi-sensor system for real-time monitoring and control of HgCdTe MBE

Journal of Electronic Materials

Volumn 28, Issue 6, 1999, Pages 749-755

  Olson, G L ^a   Roth, J A ^a   Brewer, P D ^a   Rajavel, R D ^a   Jamba, D M ^a   Jensen, J E ^a   Johs, B ^b  

^a Hughes Aircraft Co   (United States)

^b J A WOOLLAM CO INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; ELLIPSOMETRY; INFRARED DETECTORS; MERCURY COMPOUNDS; MOLECULAR BEAM EPITAXY; SEMICONDUCTOR GROWTH; SPECTROSCOPIC ANALYSIS; TEMPERATURE CONTROL;

ADSORPTION-EDGE SPECTROSCOPY; INTEGRATED MULTI-SENSOR SYSTEMS; MERCURY CADMIUM TELLURIDE;

SEMICONDUCTING FILMS;

EID: 0032630687     PISSN: 03615235     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11664-999-0065-3     Document Type: Article

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