In situ real time monitoring of thickness and composition in MBE using alpha particle energy loss

Journal of Crystal Growth

Volumn 201, Issue , 1999, Pages 26-30

  Beaudoin, M ^a   Adamcyk, M ^a   Levy, Y ^a   MacKenzie, J A ^a   Ritchie, S ^a   Tiedje, T ^a   Gelbart, Z ^b   Giesen, U ^b   Kelson, I ^c  

^a UNIVERSITY OF BRITISH COLUMBIA   (Canada)

^b TRIUMF   (Canada)

^c TEL AVIV UNIVERSITY   (Israel)

Author keywords

[No Author keywords available]

Indexed keywords

ALPHA PARTICLES; FILM GROWTH; SEMICONDUCTING FILMS; SEMICONDUCTING GALLIUM ARSENIDE; SEMICONDUCTING INDIUM PHOSPHIDE; THICKNESS MEASUREMENT;

ALPHA PARTICLE ENERGY LOSS (AEL) METHOD;

MOLECULAR BEAM EPITAXY;

EID: 0032630056     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(98)01270-6     Document Type: Article

References (15)

1. Braun W., Möller H., Zhang Y.-H. J. Vac. Sci. Technol. B. 16:1998;1507.
2. Braun W., Möller H., Zhang Y.-H. Appl. Phys. Lett. 74:1999;138.
3. Aspnes D.E. Thin Solid Films. 89:1982;249.
4. Aspnes D.E. Surf. Sci. 307-309:1994;1017.
5. Kuo C.-H., Boonzaayer M.D., DeHerrera M., Kyong T., Zhang Y.-H., Johs B., Hale J.S. J. Vac. Sci. Technol. B. 16:1998;1484.
6. Kuo C.-H., Boonzaayer M.D., DeHerrera M.F., Schroder D.K., Maracas G.N., Johs B. J. Crystal Growth. 175/176:1997;281.
7. Kelson I., Levy Y., Racah D., Redmard E., Beaudoin M., Pinnington T., Tiedje T., Giesen U. J. Phys. D. 30:1997;131.
8. Beaudoin M., Adamcyk M., Gelbart Z., Giesen U., Kelson I., Levy Y., MacKenzie J.A., Tiedje T. Appl. Phys. Lett. 72:1998;3288.
9. Beaudoin M., Gelbart Z., Giesen U., Kelson I., Levy Y., MacKenzie J.A., Pinnington T., Ritchie S., SpringThorpe A.J., Streater R., Tiedje T. Surf. Coatings Technol. 94-95:1997;374.
10. Adamcyk M., Beaudoin M., Kelson I., Levy Y., Tiedje T. J. Appl. Phys. 84:1998;6003.
11. Kelson I., Levy Y., Redmard E. J. Phys. D. 28:1995;100.
12. Vuillaume D., Stiévenard D. Fong C.Y., Batra I.P., Ciraci S. Properties of Impurity States in Superlattice Semiconductors, NATO ASI Series B. Physics 183:1988;118 Plenum Press, New York.
13. Ziegler J.F., Biersack J.P., Littmark U. The Stopping and Range of Ions in Solids. 1985;Pergamon Press, New York.
14. Weilmeier M.K., Colbow K.M., Tiedje T., Van Buuren T., Xu L. Can. J. Phys. 69:1991;422.
15. S.R. Johnson, C. Lavoie, M.K. Niessen, T. Tiedje, US Patent No. 5388909, 1995.