NO2 sensor based on InP epitaxial thin layers

Thin Solid Films

Volumn 348, Issue 1, 1999, Pages 266-272

  Battut, V ^a   Blanc, J P ^a   Goumet, E ^a   Souliere V ^b   Monteil, Y ^b  

^a UNIVERSITÉ CLERMONT AUVERGNE   (France)

^b UNIVERSITÉ LYON 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; CHEMISORPTION; ELECTRIC FIELD EFFECTS; ELECTRIC RESISTANCE MEASUREMENT; MATHEMATICAL MODELS; NITROGEN OXIDES; OHMIC CONTACTS; OXIDATION; SEMICONDUCTING INDIUM PHOSPHIDE; SEMICONDUCTOR DOPING; TEMPERATURE;

CHEMISORPTION EQUILIBRIUM; NITROGEN DIOXIDE SENSOR; SURFACE FIELD EFFECTS;

THIN FILMS;

EID: 0032625188     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00135-2     Document Type: Article

References (24)

1. W. Göpel, Sensors a Comprehensive Survey vol. 2, edited by W. Göpel, J. Hesse and J. N. Zemel, Weinheim, VCH (1991).
2. Sberveglieri G. Sensors and Actuators B. 23:1995;103-109.
3. Bergveld P. Sensors and Actuators. 8:1985;109-127.
4. Battut V., Blanc J.P., Maleysson C. Sensors and Actuators B. 44/1-3:1997;503-506.
5. Zhang W., Uchida H., Katsube T., Nakatsubo T., Nishioka Y. Sensors and Actuators B. 49:1998;58-62.
6. Miremadi B.K., Singh R.C., Chen Z., Roy Morrison S., Colbow K. Sensors and Actuators B. 21:1994;1-4.
7. Sadaoka Y., Jones T.A., Revell G.S., Göpel W. J. Mater. Sci. 25:1990;5257-5268.
8. Depero L.E., Ferroni M., Guidi V., Marca G., Martinelli G., Nelli P., Sangaletti L., Sberveglieri G. Sensors and Actuators B. 36:1996;381-383.
9. Dugay M., Maleysson C. Syn. Metals. 21:1987;255-259.
10. Selci S., Cricenti A., Felici A. C., Ferrari L., Goletti C., Chiarotti G. Phys. Rev. B. 43:(8):1991;6757-6760.
11. Dai D.-X., Zhu F.-R. Phys. Rev. B. 43:(6):1991;4803-4808.
12. Chandra A., Wood C.E.C., Woodard D.W., Eastman L.F. Solid-State Electron. 22:1979;645-650.
13. J. Achard, C. Guillot, F. Barbarin, M. Dugay, E. Goumet, Appl. Surf. Sci., under press.
14. Jeffery P.D., Burr P.M. Sensors and Actuators. 17:1989;475-480.
15. Wright J.D. Prog. Surf. Sci. 31:1989;1-60.
16. Blanc J.P., Dérouiche N. El Hadri, J.P. Germain, C. Maleysson, H. Robert. Sensors and Actuators B. 1:1990;130-133.
17. Windischmann H., Mark P. J. Electrochem. Soc.: Solid-State Sci. Technol. 126:(4):1979;627-633.
18. Passard M., Maleysson C., Pauly A., Dogo S., Germain J.P., Blanc J.P. Sensors and Actuators B. 18-19:1994;489-492.
19. S. Roy Morrisson, The chemical physics of surfaces, Plenum Press, New York, 1977.
20. P.K. Clifford, Ph.D., Carnegie Mellon University, 1981.
21. V. Demarne, thèse de docteur ès sciences, Ecole Polytechnique Fédérale de Lausanne (1991).
22. D.O. Hayward, B.M.W. Trapnell, Chemisorption, London Butterworths (1964).
23. Lechuga L.M., Calle A., Golmayo D., Tejedor P., Briones F. J. Electrochem. Soc. 138:(1):1991;159-162.
24. Kovalevskaya G.G., Meredov M.M., Pentsov A.V., Russu E.V., Slobodchikov S.V., Petisova V.M. Sov. Phys. Tech. Phys. 36:(9):1991;1065-1067.