Gas sensitivity of InP epitaxial thin layers

Sensors and Actuators, B: Chemical

Volumn 44, Issue 1-3, 1997, Pages 503-506

  Battut, V ^a   Blanc, J P ^a   Maleysson, C ^a  

^a UNIVERSITÉ CLERMONT AUVERGNE   (France)

Author keywords

Gas sensitivity; InP epitaxial thin layers; Resistance

Indexed keywords

AMMONIA; CHEMISORPTION; COMPOSITION EFFECTS; IONIZATION OF GASES; NITROGEN OXIDES; OXYGEN; SEMICONDUCTING INDIUM PHOSPHIDE; SURFACE PHENOMENA; THERMAL EFFECTS;

FIELD EFFECT MECHANISM;

CHEMICAL SENSORS;

EID: 0031250743     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(97)00130-5     Document Type: Article

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