Characterization of carrier-trapping phenomena in ultrathin chemical oxides using X-ray photoelectron spectroscopy time-dependent measurements

Applied Physics Letters

Volumn 74, Issue 14, 1999, Pages 2011-2013

  Hagimoto, Y ^a   Fujita, T ^a   Ono, K ^a   Fujioka, H ^a   Oshima, M ^a   Hirose, K ^b   Tajima, M ^b  

^a UNIVERSITY OF TOKYO   (Japan)

^b JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ORIENTATION; ELECTRON TRAPS; SEMICONDUCTING SILICON; SILICA; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

CARRIER-TRAPPING PHENOMENA;

ULTRATHIN FILMS;

EID: 0032615489     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.123730     Document Type: Article

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