HREM study of ultra-thin, amorphous carbon films and structural changes of carbon forms to diamond under ion bombardment

Diamond and Related Materials

Volumn 8, Issue 2-5, 1999, Pages 688-692

  Komninou, Ph ^a   Nouet, G ^b   Kehagias, Th ^a   Logothetidis, S ^a   Gioti, M ^a   Karakostas, Th ^a  

^a ARISTOTLE UNIVERSITY OF THESSALONIKI   (Greece)

^b CNRS   (France)

Author keywords

Amorphous carbon; Diamond; High resolution electron microscopy; Ion bombardment

Indexed keywords

AMORPHOUS FILMS; CRYSTAL LATTICES; CRYSTAL ORIENTATION; FILM GROWTH; HIGH RESOLUTION ELECTRON MICROSCOPY; ION BOMBARDMENT; MAGNETRON SPUTTERING; SILICON WAFERS; SPUTTER DEPOSITION; ULTRATHIN FILMS;

CHEMICAL THINNING;

DIAMOND FILMS;

EID: 0032615290     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00436-1     Document Type: Article

References (14)

1. Saeed A., Gaskell P.H., Jefferson D.A. Phil. Mag. B. 66:1992;171.
2. Yang J., Lin Z., Wang L.-X., Jin S., Zhang Z. Appl. Phys. Lett. 65:1994;3203.
3. Jiang X., Jia C.L. Appl. Phys. Lett. 67:1995;1197.
4. Chen Q., Wang L.-X., Zhang Z. Appl. Phys. Lett. 68:1996;176.
5. Zarrabian M., Fourches-Coulon N., Turban G., Marhic C., Lancin M. Appl. Phys. Lett. 70:1997;2535.
6. Logothetidis S. Appl. Phys. Lett. 69:1996;158.
7. Logothetidis S., Gioti M. Mater. Sci. Eng. B. 46:1997;119.
8. Logothetidis S., Lioutas Ch., Gioti M. Diamond Relat. Mater. 7:1998;449.
9. P. Patsalas, S. Logothetidis, P. Douka, M. Gioti, G. Stergioudis, Ph. Komninou, G. Nouet, Th. Karakostas, Carbon, 1999, in press.
10. Zarrabian M., Fourches-Coulon N., Turban G., Lancin M., Marhic C. Diamond Relat. Mater. 6:1997;542.
11. JCPDS powder diffraction file card 18-031.
12. JCPDS powder diffraction file card 22-1069.
13. Smith P.P.K., Bujek P.R. Science. 216:1982;984.
14. Maillard-Schaller E., Kuttel O.M., Groning P., Groning O., Agostino R.G., Aebi P., Schlapbach L. Phys. Rev. B. 55:1997;15895.