Excimer laser sputtering of mica surfaces: Mechanisms and applications

Journal of Applied Physics

Volumn 86, Issue 5, 1999, Pages 2847-2855

  Rubahn, K ^a   Ihlemann, J ^a   Rubahn, H G ^b,c  

^a LASER LABORATORIUM GÖTTINGEN E V   (Germany)

^b MAX PLANCK INSTITUTE FOR DYNAMICS AND SELF ORGANIZATION   (Germany)

^c UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); EXCIMER LASERS; GOLD; LASER ABLATION; MASS SPECTROMETRY; METALLIC FILMS; MORPHOLOGY; SINGLE CRYSTALS; SPUTTERING; SURFACE STRUCTURE; THIN FILMS; ULTRAVIOLET RADIATION;

EXCIMER LASER SPUTTERING; QUADRUPOLE MASS SPECTROMETRY (QMS);

MICA;

EID: 0032615019     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.371133     Document Type: Article

References (44)

1. W. W. Duley, UV Lasers: Effects and Applications in Materials Science (Cambridge University Press, New York, 1996).
2. P. Townsend and J. Olivares, Appl. Surf. Sci. 109/110, 275 (1997).
3. A. C. Tam, W. P. Leung, W. Zapka, and W. Ziemlich, J. Appl. Phys. 71, 3515 (1992).
4. K. Mann, B. Wolff-Rottke, and F. Müller, Appl. Surf. Sci. 96-98, 463 (1996).
5. K. Sugioka, S. Wada, Y. Ohnuma, A. Nakamura, H. Tashiro, and K. Toyoda, Appl. Surf. Sci. 96-98, 347 (1996).
6. D. Bäuerle, Appl. Surf. Sci. 106, 1 (1996).
7. J. Ihlemann and B. Wolff-Rottke, Appl. Surf. Sci. 86, 228 (1995).
8. K. Rubahn and J. Ihlemann, Appl. Surf. Sci. 127-129, 881 (1998).
9. Laser Induced Damage in Optical Materials, Proceedings of the Boulder Damage Symposium, NIST, Gaithersburg, Vols. 1-25, (1969-93).
10. K. Hattori, A. Okano, Y. Nakai, and N. Itoh, Phys. Rev. B 45, 8424 (1992).
11. K. Tanimura and J. Kanasaki, Appl. Surf. Sci. 127-129, 33 (1998).
12. J. Singh, N. Itoh, Y. Nakai, J. Kanasaki, and A. Okano, Phys. Rev. B 50, 11730 (1994).
13. D. Bäuerle, Laser Processing and Chemistry (Springer, New York,1996).
14. B. C. Stuart, M. D. Feit, A. M. Rubenchik, B. W. Shore, and M. D. Perry, Phys. Rev. Lett. 74, 2248 (1995).
15. H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wähmer, and E. E. B. Campbell, Appl. Phys. A: Mater. Sci. Process. 65A, 367 (1997).
16. J. A. DeRose, T. Thundat, L. A. Nagahara, and S. M. Lindsay, Surf. Sci. 224, 102 (1991).
17. R. W. G. Wyckoff, Crystal Structures (Interscience, New York, 1968).
18. S. Szatmari and F.-P. Schäfer, Opt. Commun. 68, 196 (1988).
19. H. Schmidt, J. Ihlemann, B. Wolff-Rottke, K. Luther, and J. Troe, J. Appl. Phys. 83, 5458 (1998).
20. C. F. Bohren and D. R. Huffman, Absorption and Scattering of Light by Small Particles (Wiley, New York, 1983).
21. S. Küper, J. Brannon, and K. Brannon, Appl. Phys. A: Solids Surf. 56, 43 (1993).
22. C. Lu and A. Czanderna, Applications of Piezoelectric Quartz Microbalances (Elsevier, New York, 1984).
23. G. Polanski and H.-G. Rubahn, J. Vac. Sci. Technol. A 14, 110 (1996).
24. R. Fröchtenicht and U. Henne, MPI for Fluid Dynamics, Report No. 8/1993, Göttingen (1993).
25. M. Buck and P. Hess, J. Electron Spectrosc. Relat. Phenom. 45, 237 (1987).
26. S. G. Hansen, J. Appl. Phys. 66, 3329 (1989).
27. B. Danielzik, N. Fabricius, M. Röwekamp, and D. von der Linde, Appl. Phys. Lett. 48, 212 (1986).
28. P. E. Dyer and R. Srinivasan, J. Appl. Phys. 66, 2608 (1989).
29. P. D. Brewer, M. Späth, and M. Stuke, Mater. Res. Soc. Symp. Proc. 334, 245 (1994).
30. G. Comsa and R. David, Surf. Sci. Rep. 5, 145 (1985).
31. Y. S. Touloukian and R. W. Powell, Thermophysical Properties of Matter, Vol. X, Thermal Diffusivity (IFI Plenum, New York, 1973).
32. H. Strehlow, Appl. Phys. A: Mater. Sci. Process. 65A, 355 (1997).
33. S. G. Hansen and T. E. Robitaille, Appl. Phys. Lett. 52, 81 (1988).
34. J. L. Brand and A. C. Tam, Appl. Phys. Lett. 56, 883 (1990).
35. J. M. Moison and M. Bensoussan, J. Vac. Sci. Technol. 21, 315 (1982).
36. Y. Kumazaki, Y. Nakai, and N. Itoh, Phys. Rev. Lett. 59, 2883 (1987).
37. K. Müller and C. C. Chang, Surf. Sci. 14, 39 (1969).
38. R. Gerlach, G. Polanski, and H.-G. Rubahn, Surf. Sci. 352-354, 485 (1996).
39. S. Guggenheim, Y.-H. Chang, and A. F. Koster van Groos, Am. Mineral. 72, 537 (1987).
40. D. Krajnovieh and J. E. Vazquez, J. Appl. Phys. 73, 3001 (1993).
41. G. Herbst, M. Steiner, G. Marowsky, and E. Matthias, Mater. Res. Soc. Symp. Proc. 397, 69 (1996).
42. J. Ihlemann, A. Scholl, H. Schmidt, and B. Wolff-Rottke, Appl. Phys. A: Mater. Sci. Process. 60, 411 (1995).
43. A. Wokaun, Mol. Phys. 56, 1 (1985).
44. J. Andrew, P. Dyer, D. Forster, and P. Key, Appl. Phys. Lett. 43, 717 (1983).