Atomic force microscope observation of the change in shape and subsequent disappearance of "crystal-originated particles" after hydrogen-atmosphere thermal annealing

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 37, Issue 1, 1998, Pages 1-4

  Yanase, Yoshio ^a   Nishihata, Hideki ^a   Ochiai, Takashi ^a   Tsuya, Hideki ^a  

^a SUMCO CORPORATION   (Japan)

Author keywords

Atomic force microscopy; Crystal originated particles; Czochralski silicon; Hydrogen annealing; Surface

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CRYSTAL ATOMIC STRUCTURE; CRYSTAL GROWTH FROM MELT; CRYSTAL ORIENTATION; ETCHING; HIGH TEMPERATURE EFFECTS; HYDROGEN; PARTICLES (PARTICULATE MATTER); SEMICONDUCTOR GROWTH; SURFACE STRUCTURE;

CRYSTAL ORIGINATED PARTICLES;

SILICON WAFERS;

EID: 0031701578     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.37.1     Document Type: Article

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